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Standard

Coater

  • Standard type with processing capacity of 500 wafers/day
  • Cluster system that is unitized provides the closest attainment of specifications

Automatic transferring machine for mass-production equipped with double-hand wafer-carrying robots. Processing unit can be installed up to a maximum of four stages. Multi-stage baking units of laminated type can be extended up to a maximum of five stages. Processing capacity of 500 wafers/day or more, and is suitable for processing using various chemical solutions from low-viscosity to high-viscosity.

Developer

  • Standard type with processing capacity of 500 wafers/day
  • Unitized cluster system provides the closest attainment of specifications

Automatic transferring machine for mass-production equipped with double-hand wafer-carrying robots. Processing unit can be installed up to a maximum of four stages. Multi-stage baking unit of laminated type can be extended up to a maximum of five stages. Processing capability is 500 wafers/day or more, and is suitable for processing using various chemical solutions from low-viscosity to high-viscosity.

Lift-off Machine

  • Standard type with processing capacity of 300 wafers/day
  • Unitized cluster system provides the closest attainment of specifications

Installed with two stages and processing capacity of 300 wafers/day or more. Compact automatic transferring machine for mass-production according to wafer size. Cross-contamination free performance enables resist stripping processing as well as lift-off processing. Removes burrs and residue, which is difficult to do by ultrasonic cleaning.