займ на карту быстро

Top > Product > High spec

Product Information

High spec

Coater

  • Processing capacity of 1,000 wafers/day or more
  • High spec model with all options

Equipped with two double-hand wafer-carrying robots. Unlike existing procedure carried out by robots, which index and process, processing unit and positioning of robots are customized to achieve reduction of footprint and transportation with high efficiency, in consideration of process flow of users. Processing unit can be installed up to a maximum seven-stage, multi-stage baking unit of laminated type can be extended up to a maximum of five stages. In order to maximize processing power, it has a processing capacity of 1,000 wafers/day or more with tuning of software tailored to processing time.

Developer

  • Processing capacity of 1,000 wafers/day or more
  • High spec model with all options

Equipped with two double-hand wafer-carrying robots. Unlike existing procedure by robots which index and process, processing unit and positioning of robots are customized to achieve reduction of footprint and transportation with high efficiency, in consideration of process flow of users. Processing unit can be installed up to a maximum of seven stages. Multi-stage baking unit of laminated type can be extended up to a maximum of five stages. In order to maximize processing power, it has a processing capacity of 1,000 wafers/day or more with tuning of software tailored to processing time.

Lift-off Machine

  • Processing capacity of 600 wafers/day or more
  • High spec model with all options

Installed with three stages or four stages, and processing capacity of 600 wafers/day or more. Jet nozzle can be configured with 10 different speeds and operating range of scanning, as well as 50 different processing patterns. Automatic switching allows up to four pressure settings. All problems such as re-attachment, dirt on the back or residue from lift-off caused by dipping will be solved.